Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734094 | Method of forming an air gap within a structure by exposing an ultraviolet sensitive material to ultraviolet radiation | Grant Kloster, Hyun-Mog Park | 2004-05-11 |
| 6605549 | Method for improving nucleation and adhesion of CVD and ALD films deposited onto low-dielectric-constant dielectrics | Chih-I Wu, Ying Zhou, Grant Kloster | 2003-08-12 |
| 6605874 | Method of making semiconductor device using an interconnect | Christopher D. Thomas | 2003-08-12 |
| 6479391 | Method for making a dual damascene interconnect using a multilayer hard mask | Patrick Morrow, Chia-Hong Jan | 2002-11-12 |