Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859534 | System and method for examining semiconductor substrates | Oliver Nagler, Marianne Unterreitmeier | 2020-12-08 |
| 9318358 | Etching device and a method for etching a material of a workpiece | Thomas Fischer, Raimund Foerg, Michael Larisch | 2016-04-19 |
| 8883565 | Separation of semiconductor devices from a wafer carrier | Mathias Vaupel, Adolf Koller, Stefan Martens | 2014-11-11 |