Issued Patents All Time
Showing 51–67 of 67 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8476990 | MEMS resonator devices | Mohsin Nawaz, Florian Schoen | 2013-07-02 |
| 8466061 | Method for forming a through via in a semiconductor element and semiconductor element comprising the same | Stefan Kolb, Ivo Rangelow, Hans-Olof Blom, Johan Bjurstroem | 2013-06-18 |
| 8415191 | Integrally fabricated micromachine and logic elements | Stefan Kolb, Reinhard Mahnkopf, Christian Pacha, Werner Weber | 2013-04-09 |
| 8318581 | Micro-electromechanical system devices | Karl-Heinz Mueller, Robert Gruenberger | 2012-11-27 |
| 8266962 | Acceleration sensor | Thoralf Kautzsch, Dirk Meinhold, Ben Rosam, Bernd Foeste, Andreas Thamm +1 more | 2012-09-18 |
| 8198690 | MEMS devices and methods of manufacture thereof | Florian Schoen, Wolfgang Raberg, Werner Weber | 2012-06-12 |
| 8125046 | Micro-electromechanical system devices | Karl-Heinz Mueller, Robert Gruenberger | 2012-02-28 |
| 8076738 | Integrally fabricated micromachine and logic elements | Stefan Kolb, Reinhard Mahnkopf, Christian Pacha, Werner Weber | 2011-12-13 |
| 8040207 | MEMS resonator devices with a plurality of mass elements formed thereon | Mohsin Nawaz, Florian Schoen | 2011-10-18 |
| 7889030 | Passive temperature compensation of silicon MEMS devices | Florian Schoen, Robert Gruenberger, Mohsin Nawaz | 2011-02-15 |
| 7851875 | MEMS devices and methods of manufacture thereof | Florian Schoen, Wolfgang Raberg, Werner Weber | 2010-12-14 |
| 7679151 | Micromechanical device and method for manufacturing a micromechanical device | Karlheinz Mueller | 2010-03-16 |
| 7612627 | Integrated binary phase shift keying with silicon MEMS resonators | Florian Schön, Wolfgang Raberg | 2009-11-03 |
| 7535217 | Force sensor array having magnetostrictive magnetoresistive sensors and method for determining a force | Eckard Quandt, Manfred Ruehrig, Stephan Schmitt, Joachim Wecker, Juergen Zimmer | 2009-05-19 |
| 7111855 | Link adjustment mechanism | Raymond H Tilly, Awad Ramouni, John F. Santori | 2006-09-26 |
| 5177925 | Wall element for the dry construction of walls | Alfred Steiner | 1993-01-12 |
| 4930283 | Brick | — | 1990-06-05 |