Issued Patents All Time
Showing 26–37 of 37 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5317161 | Ion source | Alfred Chalupka, Gertraud Lammer, Peter Wolf, Johannes Fegerl | 1994-05-31 |
| 4985634 | Ion beam lithography | Hilton F. Glavish | 1991-01-15 |
| 4967088 | Method and apparatus for image alignment in ion lithography | Hans Loschner, Ernst Hammell, Hilton F. Glavish | 1990-10-30 |
| 4924104 | Ion beam apparatus and method of modifying substrate | Hans Loschner | 1990-05-08 |
| 4894549 | Apparatus for demagnification or full-size ion projection lithography | — | 1990-01-16 |
| 4891547 | Particle or radiation beam mask and process for making same | Hans Loschner | 1990-01-02 |
| 4859857 | Ion-projection apparatus and method of operating same | Hans Loschner, Peter Wolf | 1989-08-22 |
| 4835392 | Ion-projection apparatus | Hans Loschner | 1989-05-30 |
| 4823011 | Ion-projection lithographic apparatus with means for aligning the mask image with the substrate | Hans Loschner | 1989-04-18 |
| 4780382 | Process for making a transmission mask | Hans Loschner | 1988-10-25 |
| 4775797 | Method of stabilizing a mask | Hans Loschner | 1988-10-04 |
| 4370556 | Self-supporting mask, method for production as well as use of same | Hans Loschner | 1983-01-25 |