Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11087973 | Method of selective deposition for BEOL dielectric etch | Yannick Feurprier | 2021-08-10 |
| 10319905 | Method and system for performing post-etch annealing of a workpiece | David Hurley, Shigeru Tahara, Toru Ishii | 2019-06-11 |
| 10192956 | Method for producing fin structures of a semiconductor device in a substrate | Boon Teik Chan, Safak Sayan, Min Soo Kim, Roel Gronheid | 2019-01-29 |
| 9391141 | Method for producing fin structures of a semiconductor device in a substrate | Boon Teik Chan, Safak Sayan, Min Soo Kim, Roel Gronheid | 2016-07-12 |