Issued Patents All Time
Showing 76–77 of 77 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5712702 | Method and apparatus for determining chamber cleaning end point | James G. Ryan, Michael J. Shapiro, Christopher J. Waskiewicz | 1998-01-27 |
| 5530293 | Carbon-free hydrogen silsesquioxane with dielectric constant less than 3.2 annealed in hydrogen for integrated circuits | Stephan A. Cohen, Ronald R. Uttecht | 1996-06-25 |