Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 4978594 | Fluorine-containing base layer for multi-layer resist processes | James A. Bruce, Michael L. Kerbaugh, Ranee W. Kwong, Harold G. Linde, Harbans S. Sachdev | 1990-12-18 |