Issued Patents All Time
Showing 26–31 of 31 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6826451 | Lithography tool having a vacuum reticle library coupled to a vacuum chamber | Markus Franciscus Antonius Eurlings | 2004-11-30 |
| 6778258 | Wafer handling system for use in lithography patterning | Stephen Roux, Justin Kreuzer | 2004-08-17 |
| 6369874 | Photoresist outgassing mitigation system method and apparatus for in-vacuum lithography | — | 2002-04-09 |
| 5186238 | Liquid film interface cooling chuck for semiconductor wafer processing | Paul M. Gaschke | 1993-02-16 |
| 5088006 | Liquid film interface cooling system for semiconductor wafer processing | Paul M. Gaschke | 1992-02-11 |
| 5001423 | Dry interface thermal chuck temperature control system for semiconductor wafer testing | Anthony J. Abrami, Stuart H. Bullard, Paul M. Gaschke, Mark R. LaForce, Paul J. Roggemann +1 more | 1991-03-19 |