Issued Patents All Time
Showing 51–68 of 68 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7336864 | Opto-electronic board | Laurent A. Dellmann, Bert Jan Offrein, David J. Webb | 2008-02-26 |
| 7271034 | Semiconductor device with a high thermal dissipation efficiency | Thomas J. Brunschwiler, Mark A. Lantz, Bruno Michel, Peter Vettiger | 2007-09-18 |
| 7268348 | Scanning probe for data storage and microscopy | Gerd K. Binning, Walter Haeberle, Mark A. Lantz | 2007-09-11 |
| 7186019 | Thermal movement sensor | Gerd Binnig, Mark A. Lantz, Peter Vettiger | 2007-03-06 |
| 7146067 | Microsystem switches | Ute Drechsler, Hugo E. Rothuizen, Peter Vettiger, Roland Widmer | 2006-12-05 |
| 7071031 | Three-dimensional integrated CMOS-MEMS device and process for making the same | H. Bernhard Pogge, Ute Drechsler, Peter Vettiger, Roy Yu | 2006-07-04 |
| 7054257 | AFM-based data storage and microscopy | Gerd Binnig, Peter Vettiger | 2006-05-30 |
| 6949397 | Fabrication of silicon micro mechanical structures | Roy H. Magnuson, Ute Drechsler | 2005-09-27 |
| 6835589 | Three-dimensional integrated CMOS-MEMS device and process for making the same | H. Bernhard Pogge, Ute Drechsler, Chandrika Prasad, Peter Vettiger, Roy Yu | 2004-12-28 |
| 6792173 | Device and method for switching optical signals | Gian-Luca Bona | 2004-09-14 |
| 6770558 | Selective filling of electrically conductive vias for three dimensional device structures | Emmanuel Delamarche, Ute Drechsler, Matthias Geissler | 2004-08-03 |
| 6647766 | Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever | Ute Drechsler, Mark Ian Lutwyche, Hugo E. Rothuizen, Peter Vettiger | 2003-11-18 |
| 6566653 | Investigation device and method | Christoph Gerber, Peter Vettiger, Ernst Meyer, Roland Bennewitz | 2003-05-20 |
| 6388252 | Self-detecting type of SPM probe and SPM device | Hiroshi Takahashi, Yoshiharu Shirakawabe, Nobuhiro Shimizu | 2002-05-14 |
| 6294099 | Method of processing circular patterning | Yoshiharu Shirakawabe, Hiroshi Takahashi, Susumu Ihcihara | 2001-09-25 |
| 6218086 | Method of forming ultrasmall structures and apparatus therefor | Gerd Binnig, Walter Haeberle, Peter Vettiger | 2001-04-17 |
| 6211540 | Semiconductor strain sensor and scanning probe microscope using the semiconductor strain sensor | Hiroshi Takahashi, Nobuhiro Shimizu, Yoshiharu Shirakawabe, Susumu Ichihara | 2001-04-03 |
| 6080513 | Mask and method for modification of a surface | Juergen Brugger, Peter Vettiger | 2000-06-27 |