Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12070307 | Electrically functional polymer microneedle array | Neil Ebejer, Patrick Ruch | 2024-08-27 |
| 11673798 | Microfluidic devices with electrodes formed as physically separated sections of microchannel side walls | Gabriel Fernando Puebla Hellmann, Diego Monserrat Lopez, Marcel Mayor, Emanuel Loertscher | 2023-06-13 |
| 11520228 | Mass fabrication-compatible processing of semiconductor metasurfaces | Emanuel Loertscher | 2022-12-06 |
| 10980448 | Electrically functional polymer microneedle array | Neil Ebejer, Patrick Ruch | 2021-04-20 |
| 10546992 | Buried electrode geometry for lowering surface losses in superconducting microwave circuits | Andreas Fuhrer, Andreas Kuhlmann, Veeresh V. Deshpande, Stefan Filipp, Marc Ganzhorn | 2020-01-28 |
| 9869695 | Atomic-force microscope system with integrated fabry-perot resonator | Urs T. Duerig, Armin W. Knoll, Thilo Hermann Curt Stoeferle | 2018-01-16 |
| 8963661 | Four terminal nano-electromechanical switch with a single mechanical contact | Michel Despont, Daniel Grogg, Christoph Hagleitner, Yu Pu | 2015-02-24 |
| 8925183 | Methods for fabricating an electromechanical switch | Michel Despont, Daniel Grogg, Christoph Hagleitner, Yu Pu | 2015-01-06 |
| 8847079 | Method for producing an integrated device | Laurent A. Dellmann, Michel Despont, Roland M. Guerre | 2014-09-30 |
| 8695639 | Multilayer microfluidic probe head and method of fabrication thereof | Emmanuel Delamarche, Robert Lovchik | 2014-04-15 |
| 8695641 | Multilayer microfluidic probe head and method of fabrication thereof | Emmanuel Delamarche, Robert Lovchik | 2014-04-15 |
| 8332961 | Platinum silicide tip apices for probe-based technologies | Harish Bhaskaran, Michel Despont, Abu Sebastian | 2012-12-11 |
| 8201325 | Method for producing an integrated device | Laurent A. Dellmann, Michel Despont, Roland M. Guerre | 2012-06-19 |
| 7749915 | Protection of polymer surfaces during micro-fabrication | Urs T. Duerig, Jane Elizabeth Frommer, Bernd W. Gotsmann, James L. Hedrick, Armin W. Knoll +2 more | 2010-07-06 |
| 7566939 | Fabrication of silicon micro-mechanical structures | Michel Despont, Roy H. Magnuson | 2009-07-28 |
| 7146067 | Microsystem switches | Michel Despont, Hugo E. Rothuizen, Peter Vettiger, Roland Widmer | 2006-12-05 |
| 7071031 | Three-dimensional integrated CMOS-MEMS device and process for making the same | H. Bernhard Pogge, Michel Despont, Peter Vettiger, Roy Yu | 2006-07-04 |
| 6995391 | Electrode structure for electronic and opto-electronic devices | Santos F. Alvarado, Tilman Beierlein, Brian Crone, Roland Germann, Siegfried F. Karg +6 more | 2006-02-07 |
| 6949397 | Fabrication of silicon micro mechanical structures | Michel Despont, Roy H. Magnuson | 2005-09-27 |
| 6862925 | Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever | Michel Desponet, Mark Ian Lutwyche, Hugo E. Rothuizen, Peter Vettiger | 2005-03-08 |
| 6835589 | Three-dimensional integrated CMOS-MEMS device and process for making the same | H. Bernhard Pogge, Michel Despont, Chandrika Prasad, Peter Vettiger, Roy Yu | 2004-12-28 |
| 6770558 | Selective filling of electrically conductive vias for three dimensional device structures | Emmanuel Delamarche, Michel Despont, Matthias Geissler | 2004-08-03 |
| 6647766 | Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever | Michel Despont, Mark Ian Lutwyche, Hugo E. Rothuizen, Peter Vettiger | 2003-11-18 |