| 12070307 |
Electrically functional polymer microneedle array |
Neil Ebejer, Patrick Ruch |
2024-08-27 |
| 11673798 |
Microfluidic devices with electrodes formed as physically separated sections of microchannel side walls |
Gabriel Fernando Puebla Hellmann, Diego Monserrat Lopez, Marcel Mayor, Emanuel Loertscher |
2023-06-13 |
| 11520228 |
Mass fabrication-compatible processing of semiconductor metasurfaces |
Emanuel Loertscher |
2022-12-06 |
| 10980448 |
Electrically functional polymer microneedle array |
Neil Ebejer, Patrick Ruch |
2021-04-20 |
| 10546992 |
Buried electrode geometry for lowering surface losses in superconducting microwave circuits |
Andreas Fuhrer, Andreas Kuhlmann, Veeresh V. Deshpande, Stefan Filipp, Marc Ganzhorn |
2020-01-28 |
| 9869695 |
Atomic-force microscope system with integrated fabry-perot resonator |
Urs T. Duerig, Armin W. Knoll, Thilo Hermann Curt Stoeferle |
2018-01-16 |
| 8963661 |
Four terminal nano-electromechanical switch with a single mechanical contact |
Michel Despont, Daniel Grogg, Christoph Hagleitner, Yu Pu |
2015-02-24 |
| 8925183 |
Methods for fabricating an electromechanical switch |
Michel Despont, Daniel Grogg, Christoph Hagleitner, Yu Pu |
2015-01-06 |
| 8847079 |
Method for producing an integrated device |
Laurent A. Dellmann, Michel Despont, Roland M. Guerre |
2014-09-30 |
| 8695639 |
Multilayer microfluidic probe head and method of fabrication thereof |
Emmanuel Delamarche, Robert Lovchik |
2014-04-15 |
| 8695641 |
Multilayer microfluidic probe head and method of fabrication thereof |
Emmanuel Delamarche, Robert Lovchik |
2014-04-15 |
| 8332961 |
Platinum silicide tip apices for probe-based technologies |
Harish Bhaskaran, Michel Despont, Abu Sebastian |
2012-12-11 |
| 8201325 |
Method for producing an integrated device |
Laurent A. Dellmann, Michel Despont, Roland M. Guerre |
2012-06-19 |
| 7749915 |
Protection of polymer surfaces during micro-fabrication |
Urs T. Duerig, Jane Elizabeth Frommer, Bernd W. Gotsmann, James L. Hedrick, Armin W. Knoll +2 more |
2010-07-06 |
| 7566939 |
Fabrication of silicon micro-mechanical structures |
Michel Despont, Roy H. Magnuson |
2009-07-28 |
| 7146067 |
Microsystem switches |
Michel Despont, Hugo E. Rothuizen, Peter Vettiger, Roland Widmer |
2006-12-05 |
| 7071031 |
Three-dimensional integrated CMOS-MEMS device and process for making the same |
H. Bernhard Pogge, Michel Despont, Peter Vettiger, Roy Yu |
2006-07-04 |
| 6995391 |
Electrode structure for electronic and opto-electronic devices |
Santos F. Alvarado, Tilman Beierlein, Brian Crone, Roland Germann, Siegfried F. Karg +6 more |
2006-02-07 |
| 6949397 |
Fabrication of silicon micro mechanical structures |
Michel Despont, Roy H. Magnuson |
2005-09-27 |
| 6862925 |
Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever |
Michel Desponet, Mark Ian Lutwyche, Hugo E. Rothuizen, Peter Vettiger |
2005-03-08 |
| 6835589 |
Three-dimensional integrated CMOS-MEMS device and process for making the same |
H. Bernhard Pogge, Michel Despont, Chandrika Prasad, Peter Vettiger, Roy Yu |
2004-12-28 |
| 6770558 |
Selective filling of electrically conductive vias for three dimensional device structures |
Emmanuel Delamarche, Michel Despont, Matthias Geissler |
2004-08-03 |
| 6647766 |
Device for contacting and/or modifying a surface having a cantilever and a method for production of said cantilever |
Michel Despont, Mark Ian Lutwyche, Hugo E. Rothuizen, Peter Vettiger |
2003-11-18 |
