Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7816275 | Gate patterning of nano-channel devices | Nicholas C. M. Fuller, Sarunya Bangsaruntip, Guy M. Cohen, Sebastian U. Engelmann, Qingyun Yang +1 more | 2010-10-19 |
| 7659050 | High resolution silicon-containing resist | James J. Bucchignano, Wu-Song Huang, David P. Klaus, Raman Viswanathan | 2010-02-09 |
| 7654140 | Heat pumped parametric MEMS device | Maxim Zalalutdinov, Anatoli Olkhovets, Alan T. Zehnder, Bojan Ilic, David A. Czaplewski +2 more | 2010-02-02 |
| 7399573 | Method for using negative tone silicon-containing resist for e-beam lithography | Wu-Song Huang, James J. Bucchignano, David P. Klaus, Raman Viswanathan | 2008-07-15 |
| 6515751 | Mechanically resonant nanostructures | Harold G. Craighead, Dustin Wade Carr | 2003-02-04 |