Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11575077 | Microfabricated air bridges for quantum circuits | Vivekananda P. Adiga, Hongwen Yan, John M. Papalia, David L. Rath | 2023-02-07 |
| 11440002 | Microfluidic chips with one or more vias filled with sacrificial plugs | Joshua T. Smith, Robert L. Bruce, Benjamin H. Wunsch | 2022-09-13 |
| 10714341 | Reactive ion etching assisted lift-off processes for fabricating thick metallization patterns with tight pitch | Guy M. Cohen, Sebastian U. Engelmann, Steve Holmes | 2020-07-14 |
| 9728444 | Reactive ion etching assisted lift-off processes for fabricating thick metallization patterns with tight pitch | Guy M. Cohen, Sebastian U. Engelmann, Steve Holmes | 2017-08-08 |
| 8334090 | Mixed lithography with dual resist and a single pattern transfer | Nicholas C. M. Fuller, Michael A. Guillorn, Balasubramanian S. Pranatharthi Haran | 2012-12-18 |
| 7914970 | Mixed lithography with dual resist and a single pattern transfer | Nicholas C. M. Fuller, Michael A. Guillorn, Balasubramanian S. Pranatharthi Haran | 2011-03-29 |