Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 6944578 | Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus | Reginald R. Bowley, Jr., Vincent J. Carlos, James Doran, Stephen E. Knight, Robert K. Leidy +2 more | 2005-09-13 | $5,632,000 |
| 6917901 | Contact hole profile and line edge width metrology for critical image control and feedback of lithographic focus | Reginald R. Bowley, Jr., Vincent J. Carlos, James Doran, Stephen E. Knight, Robert K. Leidy +2 more | 2005-07-12 | $9,006,000 |