Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7531059 | Cleaning of semiconductor wafers by contaminate encapsulation | Nicole S. Carpenter, Joseph Drennan, Alison K. Easton, Casey J. Grant, Andrew Hoadley +3 more | 2009-05-12 |
| 6992014 | Method and apparatus for etch rate uniformity control | Casey J. Grant, John Joseph Snyder | 2006-01-31 |
| 6939408 | Method for surface preparation of workpieces utilizing fluid separation techniques | Francis A. Abramovich, Nicole S. Carpenter, Joseph Drennan, Rick H. Gaylord, Casey J. Grant +5 more | 2005-09-06 |
| 6884722 | Method of fabricating a narrow polysilicon line | Casey J. Grant, Robert K. Leidy | 2005-04-26 |
| 6776171 | Cleaning of semiconductor wafers by contaminate encapsulation | Nicole S. Carpenter, Joseph Drennan, Alison K. Easton, Casey J. Grant, Andrew Hoadley +3 more | 2004-08-17 |
| 6670283 | Backside protection films | Faye D. Baker, Casey J. Grant, Mousa H. Ishaq, James D. Weil | 2003-12-30 |
| 6356653 | Method and apparatus for combined particle location and removal | Jeffrey A. Brigante, Glenn W. Gale, Maurice R. Hevey, Frederick William Kern, Jr., Ben Kim +1 more | 2002-03-12 |
| 6340601 | Method for reworking copper metallurgy in semiconductor devices | Thomas F. Curran, Timothy C. Krywanczyk, Michael S. Lube, Matthew D. Moon, Rock Nadeau +6 more | 2002-01-22 |