| 7531059 |
Cleaning of semiconductor wafers by contaminate encapsulation |
Nicole S. Carpenter, Joseph Drennan, Alison K. Easton, Casey J. Grant, Andrew Hoadley +3 more |
2009-05-12 |
| 6992014 |
Method and apparatus for etch rate uniformity control |
Casey J. Grant, John Joseph Snyder |
2006-01-31 |
| 6939408 |
Method for surface preparation of workpieces utilizing fluid separation techniques |
Francis A. Abramovich, Nicole S. Carpenter, Joseph Drennan, Rick H. Gaylord, Casey J. Grant +5 more |
2005-09-06 |
| 6884722 |
Method of fabricating a narrow polysilicon line |
Casey J. Grant, Robert K. Leidy |
2005-04-26 |
| 6776171 |
Cleaning of semiconductor wafers by contaminate encapsulation |
Nicole S. Carpenter, Joseph Drennan, Alison K. Easton, Casey J. Grant, Andrew Hoadley +3 more |
2004-08-17 |
| 6670283 |
Backside protection films |
Faye D. Baker, Casey J. Grant, Mousa H. Ishaq, James D. Weil |
2003-12-30 |
| 6356653 |
Method and apparatus for combined particle location and removal |
Jeffrey A. Brigante, Glenn W. Gale, Maurice R. Hevey, Frederick William Kern, Jr., Ben Kim +1 more |
2002-03-12 |
| 6340601 |
Method for reworking copper metallurgy in semiconductor devices |
Thomas F. Curran, Timothy C. Krywanczyk, Michael S. Lube, Matthew D. Moon, Rock Nadeau +6 more |
2002-01-22 |
