Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6992014 | Method and apparatus for etch rate uniformity control | Casey J. Grant, Joel M. Sharrow | 2006-01-31 |
| 6634371 | Apparatus for removing contaminants from a workpiece using a chemically reactive additive | Richard H. Gaylord, Frederick William Kern, Jr., Donald J. Martin, Harald Okorn-Schmidt, William A. Syverson | 2003-10-21 |
| 6355111 | Method for removing contaminants from a workpiece using a chemically reactive additive | Richard H. Gaylord, Frederick William Kern, Jr., Donald J. Martin, Harald Okorn-Schmidt, William A. Syverson | 2002-03-12 |