Issued Patents All Time
Showing 126–129 of 129 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6048794 | Selective W CVD plug process with a RTA self-aligned W-silicide barrier layer | Chine-Gie Lou | 2000-04-11 |
| 6024628 | Method of determining real time removal rate for polishing | — | 2000-02-15 |
| 5872045 | Method for making an improved global planarization surface by using a gradient-doped polysilicon trench--fill in shallow trench isolation | Chine-Gie Lou | 1999-02-16 |
| 5834377 | In situ method for CMP endpoint detection | Lai-Juh Chen | 1998-11-10 |