Issued Patents All Time
Showing 1–25 of 73 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8232659 | Three dimensional IC device and alignment methods of IC device substrates | Hsueh-Chung Chen, Su Chen Fan | 2012-07-31 |
| 7781892 | Interconnect structure and method of fabricating same | Hsueh-Chung Chen, Ping Liu, Su Chen Fan | 2010-08-24 |
| 7371663 | Three dimensional IC device and alignment methods of IC device substrates | Hsueh-Chung Chen, Su Chen Fan | 2008-05-13 |
| 6908810 | Method of preventing threshold voltage of MOS transistor from being decreased by shallow trench isolation formation | Ling-Yen Yeh | 2005-06-21 |
| 6856156 | Automatically adjustable wafer probe card | Sheng-Hui Liang | 2005-02-15 |
| 6784098 | Method for forming salicide process | — | 2004-08-31 |
| 6492270 | Method for forming copper dual damascene | — | 2002-12-10 |
| 6468858 | Method of forming a metal insulator metal capacitor structure | — | 2002-10-22 |
| 6451650 | Low thermal budget method for forming MIM capacitor | — | 2002-09-17 |
| 6440847 | Method for forming a via and interconnect in dual damascene | — | 2002-08-27 |
| 6432794 | Process for fabricating capacitor | — | 2002-08-13 |
| 6417066 | Method of forming a DRAM capacitor structure including increasing the surface area using a discrete silicon mask | — | 2002-07-09 |
| 6413856 | Method of fabricating dual damascene structure | — | 2002-07-02 |
| 6403486 | Method for forming a shallow trench isolation | — | 2002-06-11 |
| 6403471 | Method of forming a dual damascene structure including smoothing the top part of a via | — | 2002-06-11 |
| 6399482 | Method and structure for a conductive and a dielectric layer | — | 2002-06-04 |
| 6376326 | Method of manufacturing DRAM capacitor | — | 2002-04-23 |
| 6372653 | Method of forming dual damascene structure | Su-Yuan Chang | 2002-04-16 |
| 6358845 | Method for forming inter metal dielectric | — | 2002-03-19 |
| 6323112 | Method of fabricating integrated circuits | — | 2001-11-27 |
| 6319770 | Method for fabricating a bottom electrode of a dynamic random access memory capacitor | — | 2001-11-20 |
| 6291333 | Method of fabricating dual damascene structure | — | 2001-09-18 |
| 6277732 | Method of planarizing inter-metal dielectric layer | — | 2001-08-21 |
| 6274497 | Copper damascene manufacturing process | — | 2001-08-14 |
| 6271116 | Method of fabricating interconnects | — | 2001-08-07 |