Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6117796 | Removal of silicon oxide | Glenn W. Gale, Rangarajan Jagannathan, Karen P. Madden, Kenneth McCullough, Keith R. Pope +1 more | 2000-09-12 |
| 6066267 | Etching of silicon nitride | David L. Rath, Rangarajan Jagannathan, Kenneth McCullough, Karen P. Madden, Keith R. Pope | 2000-05-23 |
| 6033996 | Process for removing etching residues, etching mask and silicon nitride and/or silicon dioxide | David L. Rath, Rangarajan Jagannathan, Kenneth McCullough, Karen P. Madden, Keith R. Pope | 2000-03-07 |
| 5965465 | Etching of silicon nitride | David L. Rath, Rangarajan Jagannathan, Kenneth McCullough, Karen P. Madden, Keith R. Pope | 1999-10-12 |
| 5962384 | Method for cleaning semiconductor devices | Emanuel I. Cooper, Scott A. Estes, Glenn W. Gale, Rangarajan Jagannathan, David L. Rath | 1999-10-05 |