Issued Patents All Time
Showing 51–55 of 55 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5412246 | Low temperature plasma oxidation process | David L. Harmon, Srinandan R. Kasi, Donald M. Kenney, Son V. Nguyen, Tue Nguyen +1 more | 1995-05-02 |
| 5330935 | Low temperature plasma oxidation process | David L. Harmon, Srinandan R. Kasi, Donald M. Kenney, Son Van Nguyen, Tue Nguyen +1 more | 1994-07-19 |
| 5217567 | Selective etching process for boron nitride films | Donna R. Cote, Son V. Nguyen | 1993-06-08 |
| 5204138 | Plasma enhanced CVD process for fluorinated silicon nitride films | Son V. Nguyen, Douglas J. Dopp, David L. Harmon | 1993-04-20 |
| 5173452 | Process for the vapor deposition of polysilanes photoresists | Mark C. Hakey, Steven J. Holmes, David V. Horak | 1992-12-22 |