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2012-02-14 |
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Reticle storage pod (RSP) transport system utilizing FOUP adapter plate |
Philip Campbell, Edward Sherwood, Uldis A. Ziemins |
2011-02-15 |
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Overhead transport service vehicle and method |
Clayton D. Menser, Jr., Uldis A. Ziemins |
2010-12-21 |
| 7591624 |
Reticle storage pod (RSP) transport system utilizing FOUP adapter plate |
Philip Campbell, Edward Sherwood, Uldis A. Ziemins |
2009-09-22 |
| 6960772 |
Mask carrier |
Gary J. Johnson |
2005-11-01 |
| 6908255 |
Remote clamping mechanism via vacuum feedthrough |
Rodney A. Kendall, Lonn E. Moore, Richard Rieland |
2005-06-21 |
| 6818906 |
Electron beam position reference system |
John G. Hartley, Rodney A. Kendall, Richard Rieland |
2004-11-16 |
| 6806943 |
Mask clamping device |
Wayne A. Barringer, Joseph Santilli, Maris A. Sturans |
2004-10-19 |
| 6724001 |
Electron beam lithography apparatus with self actuated vacuum bypass valve |
Rodney A. Kendall |
2004-04-20 |
| 6615481 |
Method for fabrication of electromagnetic coil vanes |
Mark J. LaPlante |
2003-09-09 |
| 6461680 |
Simplified fabrication method of toroidal charged particle deflector vanes |
— |
2002-10-08 |
| 6414313 |
Multiple numerical aperture electron beam projection lithography system |
Michael S. Gordon, Rodney A. Kendall |
2002-07-02 |
| 6246053 |
Non-contact autofocus height detector for lithography systems |
Rodney A. Kendall, Gary J. Johnson |
2001-06-12 |
| 5843623 |
Low profile substrate ground probe |
— |
1998-12-01 |
| 5742065 |
Heater for membrane mask in an electron-beam lithography system |
Michael S. Gordon, Rodney A. Kendall, James L. Speidell |
1998-04-21 |
