Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7239371 | Density-aware dynamic leveling in scanning exposure systems | Bernhard R. Liegl, Scott Bukofsky, Steven J. Holmes | 2007-07-03 |
| 7229936 | Method to reduce photoresist pattern collapse by controlled surface microroughening | Scott Bukofsky, Dario L. Goldfarb, Scott D. Halle | 2007-06-12 |
| 7132316 | After deposition method of thinning film to reduce pinhole defects | Wai-Kin Li, Steven Scheer | 2006-11-07 |
| 7083898 | Method for performing chemical shrink process over BARC (bottom anti-reflective coating) | Todd C. Bailey, Allen H. Gabor | 2006-08-01 |