Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5874318 | Dishing and erosion monitor structure for damascene metal processing | Faye D. Baker, Daniel S. Brooks, Robert K. Leidy, Rock Nadeau | 1999-02-23 |
| 5723874 | Dishing and erosion monitor structure for damascene metal processing | Faye D. Baker, Daniel S. Brooks, Robert K. Leidy, Rock Nadeau | 1998-03-03 |
| 5663637 | Rotary signal coupling for chemical mechanical polishing endpoint detection with a westech tool | Leping Li, Steven G. Barbee, Gary R. Doyle, Arnold Halperin, Kevin L. Holland +4 more | 1997-09-02 |