Issued Patents All Time
Showing 126–128 of 128 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9576954 | POC process flow for conformal recess fill | Sanjay C. Mehta, Balasubramanian Pranatharthiharan, Ruilong Xie | 2017-02-21 |
| 9558995 | HDP fill with reduced void formation and spacer damage | Huiming Bu, Balasubramanian Pranatharthiharan, Ruilong Xie | 2017-01-31 |
| 9406767 | POC process flow for conformal recess fill | Sanjay C. Mehta, Balasubramanian Pranatharthiharan, Ruilong Xie | 2016-08-02 |