Issued Patents All Time
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9159608 | Method for forming TiSiN thin film layer by using atomic layer deposition | Woong Park, Gi Youl Kim, Brian Lu, Greg Siu, Hugo Silva +1 more | 2015-10-13 |
Showing 26–26 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9159608 | Method for forming TiSiN thin film layer by using atomic layer deposition | Woong Park, Gi Youl Kim, Brian Lu, Greg Siu, Hugo Silva +1 more | 2015-10-13 |