Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7282305 | Reflective mask blank having a programmed defect and method of producing the same, reflective mask having a programmed defect and method of producing the same, and substrate for use in producing the reflective mask blank or the reflective mask having a programmed defect | Tsutomo Shoki, Takeru Kinoshita | 2007-10-16 |
| 7115341 | Halftone phase shift mask blank, halftone phase shift mask, and method of producing the same | Yuuki Shiota, Osamu Nozawa, Hideaki Mitsui | 2006-10-03 |
| 7011910 | Halftone-type phase-shift mask blank, and halftone-type phase-shift mask | Yuki Shiota, Osamu Nozawa, Hideaki Mitsui | 2006-03-14 |
| 6317480 | Method of manufacturing X-ray mask and X-ray mask blank, and X-ray mask and X-ray mask blank manufactured thereby | Tsutomu Shoki, Akinori Kurikawa, Takamitsu Kawahara | 2001-11-13 |