Issued Patents All Time
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9773678 | Semiconductor substrate and method for manufacturing semiconductor substrate | Ko IMAOKA, Motoki Kobayashi, Hidetsugu Uchida, Kuniaki Yagi, Naoki Hatta +4 more | 2017-09-26 |
| 9761479 | Manufacturing method for semiconductor substrate | Ko IMAOKA, Motoki Kobayashi, Hidetsugu Uchida, Kuniaki Yagi, Naoki Hatta +5 more | 2017-09-12 |
| 8890170 | Silicon carbide substrate, semiconductor device and method for manufacturing silicon carbide substrate | Hiroyuki Nagasawa, Kuniaki Yagi, Naoki Hatta | 2014-11-18 |
| 8133321 | Process for producing silicon carbide single crystal | Kuniaki Yagi, Naoki Hatta, Hiroyuki Nagasawa | 2012-03-13 |
| 7211337 | Compound crystal and method of manufacturing same | Hiroyuki Nagasawa, Kuniaki Yagi | 2007-05-01 |
| 7101774 | Method of manufacturing compound single crystal | Hiroyuki Nagasawa, Kuniaki Yagi | 2006-09-05 |
| 6821340 | Method of manufacturing silicon carbide, silicon carbide, composite material, and semiconductor element | Hiroyuki Nagasawa, Kuniaki Yagi | 2004-11-23 |
| 6736894 | Method of manufacturing compound single crystal | Hiroyuki Nagasawa, Kuniaki Yagi | 2004-05-18 |
| 6703288 | Compound crystal and method of manufacturing same | Hiroyuki Nagasawa, Kuniaki Yagi | 2004-03-09 |
| 6596080 | Silicon carbide and method for producing the same | Hiroyuki Nagasawa, Kuniaki Yagi | 2003-07-22 |
| 6475456 | Silicon carbide film and method for manufacturing the same | Yukitaka Nakano, Hiroyuki Nagasawa, Kuniaki Yagi | 2002-11-05 |
| 6416578 | Silicon carbide film and method for manufacturing the same | Yukitaka Nakano, Hiroyuki Nagasawa, Kuniaki Yagi | 2002-07-09 |
| 6317480 | Method of manufacturing X-ray mask and X-ray mask blank, and X-ray mask and X-ray mask blank manufactured thereby | Tsutomu Shoki, Akinori Kurikawa, Ryo Ohkubo | 2001-11-13 |
| 6128363 | X-ray mask blank, x-ray mask, and pattern transfer method | Tsutomu Shoki | 2000-10-03 |
| 5999590 | X-ray mask blank and manufacturing method for the same, and manufacturing method for X-ray mask | Tsutomu Shoki | 1999-12-07 |
| 5848120 | X-ray mask blank, X-ray mask and pattern transfer method | Tsutomu Shoki | 1998-12-08 |