Issued Patents All Time
Showing 51–56 of 56 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5739589 | Semiconductor integrated circuit device process for fabricating the same and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1998-04-14 |
| 5670421 | Process for forming multilayer wiring | Eisuke Nishitani, Susumu Tsuzuku, Shigeru Kobayashi, Osamu Kasahara, Hiroki Nezu +1 more | 1997-09-23 |
| 5557147 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1996-09-17 |
| 5498768 | Process for forming multilayer wiring | Eisuke Nishitani, Susumu Tsuzuku, Shigeru Kobayashi, Osamu Kasahara, Hiroki Nezu +1 more | 1996-03-12 |
| 5331191 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1994-07-19 |
| 5202275 | Semiconductor integrated circuit device, process for fabricating the same, and apparatus for fabricating the same | Jun Sugiura, Osamu Tsuchiya, Makoto Ogasawara, Fumio Ootsuka, Kazuyoshi Torii +22 more | 1993-04-13 |