Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7731797 | Substrate treating apparatus and semiconductor device manufacturing method | Seiyo Nakashima, Tomoshi Taniyama, Yoshikazu Takashima | 2010-06-08 |
| 7556839 | Method of manufacturing semiconductor device and apparatus for processing substrate | Takaaki Noda | 2009-07-07 |
| 6790793 | Method for manufacturing semiconductor device | Yutaka Nishino, Norikazu Mizuno | 2004-09-14 |
| 6720274 | Method for fabricating a semiconductor device and a substrate processing apparatus | Takashi Ozaki, Norikazu Mizuno | 2004-04-13 |