Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9022834 | Polishing solution for CMP and polishing method using the polishing solution | Eiichi Satou, Munehiro Oota, Kanshi Chinone, Shigeru Nobe, Kazuhiro Enomoto +3 more | 2015-05-05 |
| 8486837 | Polishing slurry for metal, and polishing method | Hiroshi Ono, Katsuyuki Masuda | 2013-07-16 |
| 7374474 | Polishing pad for CMP, method for polishing substrate using it and method for producing polishing pad for CMP | Masaya Nishiyama, Yasuhito Iwatsuki, Hirokazu Hiraoka | 2008-05-20 |