Issued Patents All Time
Showing 26–29 of 29 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8712575 | Hydrostatic pad pressure modulation in a simultaneous double side wafer grinder | Roland R. Vandamme, Tomomi Komura | 2014-04-29 |
| 8145342 | Methods and systems for adjusting operation of a wafer grinder using feedback from warp data | Roland R. Vandamme, Tomomi Komura, Tomhiko Kaneko, Takuto Kazama | 2012-03-27 |
| 7930058 | Nanotopography control and optimization using feedback from warp data | Roland R. Vandamme, Tomomi Komura, Tomohiko Kaneko, Takuto Kazama | 2011-04-19 |
| 7601049 | Double side wafer grinder and methods for assessing workpiece nanotopology | Milind S. Bhagavat, Roland R. Vandamme, Tomomi Komura | 2009-10-13 |