Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8267745 | Methods of grinding semiconductor wafers having improved nanotopology | Milind S. Bhagavat, Puneet Gupta, Roland R. Vandamme, Noriyuki Tachi | 2012-09-18 |
| 8145342 | Methods and systems for adjusting operation of a wafer grinder using feedback from warp data | Sumeet S. Bhagavat, Roland R. Vandamme, Tomomi Komura, Tomhiko Kaneko | 2012-03-27 |
| 8066553 | Wafer clamping device for a double side grinder | Milind S. Bhagavat, Puneet Gupta, Roland R. Vandamme, Noriyuki Tachi | 2011-11-29 |
| 7930058 | Nanotopography control and optimization using feedback from warp data | Sumeet S. Bhagavat, Roland R. Vandamme, Tomomi Komura, Tomohiko Kaneko | 2011-04-19 |