Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 10115621 | Method for in-die overlay control using FEOL dummy fill layer | Peter Moll, Martin Schmidt, Carsten Hartig, Matthias Ruhm, Stefan Thierbach +3 more | 2018-10-30 | $22,881,000 |