Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7906426 | Method of controlled low-k via etch for Cu interconnections | Wuping Liu, Johnny Widodo, Teck Jung Tang, Jing Hui Li, Larry Clevenger +1 more | 2011-03-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7906426 | Method of controlled low-k via etch for Cu interconnections | Wuping Liu, Johnny Widodo, Teck Jung Tang, Jing Hui Li, Larry Clevenger +1 more | 2011-03-15 |