Issued Patents All Time
Showing 26–50 of 72 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9319020 | Temperature compensation in a semiconductor micromechanical resonator via charge carrier depletion | Ashwin Samarao | 2016-04-19 |
| 9318998 | Acoustically-engineered multi-port piezoelectric-on-semiconductor resonators for accurate temperature sensing and reference signal generation | Roozbeh Tabrizian | 2016-04-19 |
| 9279824 | Bulk acoustic wave accelerometers | — | 2016-03-08 |
| 9154108 | Self-polarized capacitive micromechanical resonator apparatus and fabrication method | Ashwin Samarao | 2015-10-06 |
| 9003882 | Vibratory tuning fork based six-degrees of freedom inertial measurement MEMS device | Divyanshu Agrawal | 2015-04-14 |
| 8763441 | Method and apparatus for self-calibration of gyroscopes | Giorgio Casinovi, Wang Kyung Sung, Milap Jayesh Dalal, Arashk Norouz Pour Shirazi | 2014-07-01 |
| 8680752 | Piezoelectric micromechanical energy harvesters | Logan D. Sorenson, Jenna Fu | 2014-03-25 |
| 8677821 | Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope | Ajit Sharma, Mohammad Faisal Zaman | 2014-03-25 |
| 8624471 | Piezoelectric-on-semiconductor micromechanical resonators with linear acoustic bandgap tethers | Logan D. Sorenson, Jenna Fu | 2014-01-07 |
| 8528404 | Bulk acoustic wave accelerometers | — | 2013-09-10 |
| 8519598 | Microelectromechanical resonators having piezoelectric layers therein that support actuation and sensing through a longitudinal piezoelectric effect | Roozbeh Tabrizian | 2013-08-27 |
| 8476096 | Packaging for micro electro-mechanical systems and methods of fabricating thereof | Paul A. Kohl, Paul Jayachandran Joseph | 2013-07-02 |
| 8450913 | Tunable Piezoelectric MEMS Resonators suitable for real-time clock applications | Diego Emilio Serrano | 2013-05-28 |
| 8405170 | Packaging for micro electro-mechanical systems and methods of fabricating thereof | Paul A. Kohl, Paul Jayachandran Joseph | 2013-03-26 |
| 8381378 | Methods of forming micromechanical resonators having high density trench arrays therein that provide passive temperature compensation | Roozbeh Tabrizian, Giorgio Casinovi | 2013-02-26 |
| 8354332 | Methods of forming micro-electromichanical resonators having boron-doped resonator bodies containing eutectic alloys | Ashwin Samarao | 2013-01-15 |
| 8242663 | Oscillator having micro-electromechanical resonators and driver circuits therein that support in-phase and out-of-phase signals | Reza Abdolvand, Seyed Hossein Miri Lavasani | 2012-08-14 |
| 8174017 | Integrating three-dimensional high capacitance density structures | Markondeya Raj Pulugurtha, Devarajan Balaraman, Isaac Abothu, Rao R. Tummala | 2012-05-08 |
| 8166816 | Bulk acoustic wave gyroscope | Houri Johari | 2012-05-01 |
| 8061013 | Micro-electromechanical resonators having electrically-trimmed resonator bodies therein and methods of fabricating same using joule heating | Ashwin Samarao | 2011-11-22 |
| 8061201 | Readout method and electronic bandwidth control for a silicon in-plane tuning fork gyroscope | Ajit Sharma, Mohammad Faisal Zaman | 2011-11-22 |
| 8063720 | MEMS resonators having resonator bodies therein with concave-shaped sides that support high quality factor and low temperature coefficient of resonant frequency | Ashwin Samarao | 2011-11-22 |
| 8022779 | Integrated circuit oscillators having microelectromechanical resonators therein with parasitic impedance cancellation | Seyed Hossein Miri Lavasani | 2011-09-20 |
| 7977136 | Microelectromechanical systems structures and self-aligned high aspect-ratio combined poly and single-crystal silicon fabrication processes for producing same | Mina Raieszadeh, Pezhman Monadgemi | 2011-07-12 |
| 7933112 | Micro-electromechanical voltage tunable capacitor and and filter devices | Mina Raieszadeh | 2011-04-26 |