Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9742373 | Method of manufacturing a temperature-compensated micromechanical resonator | Zhengzheng Wu, Vikram Atul Thakar, Adam E. Peczalski | 2017-08-22 |
| 9419213 | Directly heated RF phase change switch | Yonghyun Shim, Muzhi Wang | 2016-08-16 |
| 9197188 | Wide range continuously tunable capacitor bank | Yonghyun Shim | 2015-11-24 |
| 9097578 | Infrared sensing using pyro/piezo-electric resonators | Vikrant J. Gokhale | 2015-08-04 |
| 7977136 | Microelectromechanical systems structures and self-aligned high aspect-ratio combined poly and single-crystal silicon fabrication processes for producing same | Farrokh Ayazi, Pezhman Monadgemi | 2011-07-12 |
| 7933112 | Micro-electromechanical voltage tunable capacitor and and filter devices | Farrokh Ayazi | 2011-04-26 |
| 7847669 | Micro-electromechanical switched tunable inductor | Farrokh Ayazi, Paul A. Kohl | 2010-12-07 |