Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8680752 | Piezoelectric micromechanical energy harvesters | Farrokh Ayazi, Logan D. Sorenson | 2014-03-25 |
| 8624471 | Piezoelectric-on-semiconductor micromechanical resonators with linear acoustic bandgap tethers | Farrokh Ayazi, Logan D. Sorenson | 2014-01-07 |