Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6115538 | Steam supplying apparatus and method for controlling same | Shuzo Fujimura, Yuuji Matoba, Yoshimasa Nakano, Tatsuya Takeuchi, Takeshi Miyanaga | 2000-09-05 |
| 5998104 | Method of stripping a resist mask | Shuzo Fujimura, Naomichi Abe | 1999-12-07 |
| 5961775 | Apparatus for removing organic resist from semiconductor | Shuzo Fujimura, Naomichi Abe | 1999-10-05 |
| 5832177 | Method for controlling apparatus for supplying steam for ashing process | Shuzo Fujimura, Yuuji Matoba, Yoshimasa Nakano, Tatsuya Takeuchi, Takeshi Miyanaga | 1998-11-03 |
| 5773201 | Method of stripping a resist mask | Shuzo Fujimura, Naomichi Abe | 1998-06-30 |
| 5681780 | Manufacture of semiconductor device with ashing and etching | Satoru Mihara, Tatsuya Takeuchi | 1997-10-28 |
| 5628871 | Method of removing resist mask and a method of manufacturing semiconductor device | — | 1997-05-13 |
| 5478403 | Process and apparatus for ashing treatment | Shuzo Fujimura | 1995-12-26 |
| 5397432 | Method for producing semiconductor integrated circuits and apparatus used in such method | Jun-ichi Konno, Toshiyuki Ishida, Takahiro Ito, Tetsuo Kondo, Fukashi Harada +1 more | 1995-03-14 |
| 5057187 | Ashing method for removing an organic film on a substance of a semiconductor device under fabrication | Shuzo Fujimura, Kenichi Hikazutani | 1991-10-15 |
| 4983254 | Processing for stripping organic material | Shuzo Fujimura, Kenichi Hikazutani | 1991-01-08 |
| 4961820 | Ashing method for removing an organic film on a substance of a semiconductor device under fabrication | Shuzo Fujimura, Kenichi Hikazutani | 1990-10-09 |