Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6115538 | Steam supplying apparatus and method for controlling same | Keisuke Shinagawa, Shuzo Fujimura, Yoshimasa Nakano, Tatsuya Takeuchi, Takeshi Miyanaga | 2000-09-05 |
| 5832177 | Method for controlling apparatus for supplying steam for ashing process | Keisuke Shinagawa, Shuzo Fujimura, Yoshimasa Nakano, Tatsuya Takeuchi, Takeshi Miyanaga | 1998-11-03 |