Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7468297 | Method of manufacturing semiconductor device | Toshiro Futatsugi, Naoto Horiguchi, Ken Okabe | 2008-12-23 |
| 6709959 | Semiconductor device having a shallow junction and a fabrication process thereof | Masataka Kase, Toshiki Miyake, Mitsuaki Hori, Manabu Nakamura, Takayuki Wada +1 more | 2004-03-23 |
| 6187600 | Silicon substrate evaluation method and semiconductor device manufacturing method | Yoichi Fujisawa, Kaoru Ogawa | 2001-02-13 |
| 5637528 | Semiconductor device manufacturing method including dry oxidation | Masaaki Higashitani | 1997-06-10 |
| 5057187 | Ashing method for removing an organic film on a substance of a semiconductor device under fabrication | Keisuke Shinagawa, Shuzo Fujimura | 1991-10-15 |
| 4983254 | Processing for stripping organic material | Shuzo Fujimura, Keisuke Shinagawa | 1991-01-08 |
| 4980022 | Method of removing a layer of organic matter | Shuzo Fujimura | 1990-12-25 |
| 4961820 | Ashing method for removing an organic film on a substance of a semiconductor device under fabrication | Keisuke Shinagawa, Shuzo Fujimura | 1990-10-09 |