Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5391886 | Charged particle beam exposure system and method of exposing a pattern on an object by such a charged particle beam exposure system | Akio Yamada, Yoshihisa Oae, Satoru Yamazaki, Tomohiko Abe, Katsuhiko Kobayashi +1 more | 1995-02-21 |
| 5255228 | Semiconductor memory device with redundancy circuits | Minoru Hatta | 1993-10-19 |
| 5194741 | Method for writing a pattern on an object by a focused electron beam with an improved efficiency | Kiichi Sakamoto, Yoshihisa Oae, Yasushi Takahashi | 1993-03-16 |