Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5795494 | Semiconductor substrate cleaning method and semiconductor device fabrication method | Yuka Hayami, Miki Suzuki, Hiroki Ogawa, Shuzo Fujimura, Yoshiko Okui | 1998-08-18 |
| 5727511 | Cylinder liner and cylinder block and method for producing the cylinder liner and the cylinder block | Hiroyuki Omura, Shin Nitta, Yosuke Takahashi, Hirotake Usui, Jun Isomoto +2 more | 1998-03-17 |
| 4889820 | Method of producing a semiconductor device | — | 1989-12-26 |
| 4806769 | Disk exchangeable target mechanism with effective cooling means, for ion implantation system | Motoo Nakano | 1989-02-21 |
| 4803884 | Method for measuring lattice defects in semiconductor | Hiroshi Kaneta, Tsutomu Ogawa, Kunihiko Wada | 1989-02-14 |
| 4788473 | Plasma generating device with stepped waveguide transition | Motoo Nakano, Yoshinobu Ono, Takashi Igarashi, Masanao Hotta | 1988-11-29 |
| 4785188 | Primary particle beam irradiation apparatus and method of irradiation thereof | Tadayuki Kojima, Satoshi Hasui, Hiroshi Ohmori, Shuji Kikuchi | 1988-11-15 |
| 4500365 | Laser treating implanted semiconductor surface through photo-resist layer | — | 1985-02-19 |
| 4410801 | Ion implantation equipment | Junji Sakurai | 1983-10-18 |
| 4381202 | Selective epitaxy by beam energy and devices thereon | Tsutomu Ogawa, Takashi Matsumoto | 1983-04-26 |
| 4375993 | Method of producing a semiconductor device by simultaneous multiple laser annealing | Hajime Kamioka, Motoo Nakano, Nobuo Sasaki | 1983-03-08 |
| 4258077 | Method of ion implantation into a semiconductor substrate provided with an insulating film | Motoo Nakano | 1981-03-24 |