Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5795494 | Semiconductor substrate cleaning method and semiconductor device fabrication method | Yuka Hayami, Miki Suzuki, Hiroki Ogawa, Shuzo Fujimura, Haruhisa Mori | 1998-08-18 |
| 5395452 | Apparatus made of silica for semiconductor device fabrication | Masanori Kobayashi, Ken Yamazaki, Tsutomu Ogawa | 1995-03-07 |