Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797626 | Method of polishing copper layer of substrate | Noriko MIYAIRI, Tsuyoshi Hasegawa, Yuji Terashima, Kenji Sakai, Tadahiro Kitamura +1 more | 2004-09-28 |
| 6361418 | Abrasive system | — | 2002-03-26 |
| 6332828 | Method of and apparatus for mirror-like polishing wafer chamfer with orientation flat | Fumihiko Hasegawa, Yasuyoshi Kuroka, Toshihiro Tsuchiya, Koichiro Ichikawa | 2001-12-25 |
| 6330776 | Structure for reinforcing concrete member and reinforcing method | Yasuo Jinno, Hideto Saito, Hideo Tsukagoshi, Jun'ichi Iketani, Tadao Fujita +2 more | 2001-12-18 |
| 6113463 | Method of and apparatus for mirror-like polishing wafer chamfer with orientation flat | Fumihiko Hasegawa, Yasuyoshi Kuroka, Toshihiro Tsuchiya, Koichiro Ichikawa | 2000-09-05 |
| 5928066 | Apparatus for polishing peripheral portion of wafer | Fumihiko Hasegawa, Yasuyoshi Kuroda, Toshihiro Tsuchiya, Koichiro Ichikawa | 1999-07-27 |
| 5879225 | Polishing machine | Michio Kudo, Makoto Nakajima, Masanori Fukushima | 1999-03-09 |
| 5766065 | Apparatus for polishing peripheral portion of wafer | Fumihiko Hasegawa, Yasuyoshi Kuroda, Koichiro Ichikawa | 1998-06-16 |
| 5733181 | Apparatus for polishing the notch of a wafer | Fumihiko Hasegawa, Tatsuo Ohtani, Yasuyoshi Kuroda, Koichiro Ichikawa | 1998-03-31 |
| 5727990 | Method for mirror-polishing chamfered portion of wafer and mirror-polishing apparatus | Fumihiko Hasegawa, Tatsuo Ohtani, Yasuyoshi Kuroda, Koichiro Ichikawa | 1998-03-17 |
| 5549502 | Polishing apparatus | Kohichi Tanaka, Hiromasa Hashimoto, Makoto Nakajima | 1996-08-27 |
| 5476413 | Apparatus for polishing the periphery portion of a wafer | Fumihiko Hasegawa, Tatsuo Ohtani, Yasuyoshi Kuroda, Koichiro Ichikawa | 1995-12-19 |
| 4876143 | Rod material | Minoru Sugita, Teruyuki Nakatsuji, Tadashi Fujisaki, Minoru Sawaide, Noboru Ishikawa | 1989-10-24 |