Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8333882 | Polishing apparatus and method of polishing work | Unkai Sato, Yoshinobu Nishimoto, Yoshio Nakamura, Tsuyoshi Hasegawa, Masumi Iihama | 2012-12-18 |
| 6332828 | Method of and apparatus for mirror-like polishing wafer chamfer with orientation flat | Fumihiko Hasegawa, Yasuyoshi Kuroka, Toshihiro Tsuchiya, Yasuo Inada | 2001-12-25 |
| 6113463 | Method of and apparatus for mirror-like polishing wafer chamfer with orientation flat | Fumihiko Hasegawa, Yasuyoshi Kuroka, Toshihiro Tsuchiya, Yasuo Inada | 2000-09-05 |
| 5928066 | Apparatus for polishing peripheral portion of wafer | Fumihiko Hasegawa, Yasuyoshi Kuroda, Toshihiro Tsuchiya, Yasuo Inada | 1999-07-27 |
| 5766065 | Apparatus for polishing peripheral portion of wafer | Fumihiko Hasegawa, Yasuyoshi Kuroda, Yasuo Inada | 1998-06-16 |
| 5733181 | Apparatus for polishing the notch of a wafer | Fumihiko Hasegawa, Tatsuo Ohtani, Yasuyoshi Kuroda, Yasuo Inada | 1998-03-31 |
| 5727990 | Method for mirror-polishing chamfered portion of wafer and mirror-polishing apparatus | Fumihiko Hasegawa, Tatsuo Ohtani, Yasuyoshi Kuroda, Yasuo Inada | 1998-03-17 |
| 5476413 | Apparatus for polishing the periphery portion of a wafer | Fumihiko Hasegawa, Tatsuo Ohtani, Yasuyoshi Kuroda, Yasuo Inada | 1995-12-19 |
| 5458529 | Apparatus for polishing notch portion of wafer | Fumihiko Hasegawa, Tatsuo Ohtani, Yoshio Nakamura | 1995-10-17 |
| 5429544 | Polishing apparatus for notch portion of wafer | Fumihiko Hasegawa, Tatsuo Ohtani, Yoshio Nakamura | 1995-07-04 |