Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6332828 | Method of and apparatus for mirror-like polishing wafer chamfer with orientation flat | Fumihiko Hasegawa, Toshihiro Tsuchiya, Koichiro Ichikawa, Yasuo Inada | 2001-12-25 |
| 6113463 | Method of and apparatus for mirror-like polishing wafer chamfer with orientation flat | Fumihiko Hasegawa, Toshihiro Tsuchiya, Koichiro Ichikawa, Yasuo Inada | 2000-09-05 |