Issued Patents All Time
Showing 26–49 of 49 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10534376 | Gas divided flow supplying apparatus for semiconductor manufacturing equipment | Kouji Nishino, Ryousuke Dohi, Kaoru Hirata, Nobukazu Ikeda | 2020-01-14 |
| 10386863 | Pressure-type flow controller | Kaoru Hirata, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi | 2019-08-20 |
| 10386861 | Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same | Kaoru Hirata, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda | 2019-08-20 |
| 10372145 | Pressure-type flow rate control device | Takashi Hirose, Toshihide Yoshida, Atsushi Matsumoto, Kaoru Hirata, Nobukazu Ikeda +2 more | 2019-08-06 |
| 10274356 | Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using container | Kaoru Hirata, Atsushi Hidaka, Kouji Nishino, Nobukazu Ikeda | 2019-04-30 |
| 10174858 | Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve | Kaoru Hirata, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda | 2019-01-08 |
| 10073469 | Flow meter and flow control device provided therewith | Masaaki Nagase, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Atsushi Hidaka | 2018-09-11 |
| 9921089 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2018-03-20 |
| 9870006 | Pressure type flow control system with flow monitoring | Kaoru Hirata, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda | 2018-01-16 |
| 9841770 | Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device | Kaoru Hirata, Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Masaaki Nagase | 2017-12-12 |
| 9746856 | Multi-hole orifice plate for flow control, and flow controller using the same | Kaoru Hirata, Atsushi Hidaka, Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda +2 more | 2017-08-29 |
| 9632511 | Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same | Kaoru Hirata, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda | 2017-04-25 |
| 9494947 | Pressure type flow control system with flow monitoring | Kaoru Hirata, Ryousuke Dohi, Kouji Nishino, Nobukazu Ikeda | 2016-11-15 |
| 9383758 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2016-07-05 |
| 9133951 | Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed | Tadahiro Ohmi, Kouji Nishino, Ryousuke Dohi, Nobukazu Ikeda, Masaaki Nagase +6 more | 2015-09-15 |
| 9010369 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2015-04-21 |
| 8757197 | Automatic pressure regulator for flow rate regulator | Kaoru Hirata, Kouji Nishino, Ryousuke Dohi, Nobukazu Ikeda | 2014-06-24 |
| 8601976 | Gas supply system for semiconductor manufacturing facilities | Kouji Nishino, Ryousuke Dohi, Masaaki Nagase, Kaoru Hirata, Nobukazu Ikeda | 2013-12-10 |
| 8606412 | Method for detecting malfunction of valve on the downstream side of throttle mechanism of pressure type flow control apparatus | Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino, Kaoru Hirata +1 more | 2013-12-10 |
| 8587180 | Pressure control valve driving circuit for pressure type flow rate control device with flow rate self-diagnosis function | Nobukazu Ikeda, Kouji Nishino, Ryousuke Dohi, Kaoru Hirata, Takatoshi NAKATANI | 2013-11-19 |
| 8418714 | Flow rate range variable type flow rate control apparatus | Tadahiro Ohmi, Masahito Saito, Shoichi Hino, Tsuyoshi Shimazu, Kazuyuki Miura +10 more | 2013-04-16 |
| 7945414 | Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensor | Masaaki Nagase, Ryousuke Dohi, Nobukazu Ikeda, Kouji Nishino, Kaoru Hirata +1 more | 2011-05-17 |
| 7669455 | Automatic zero point correction device for a pressure sensor, a pressure control device and a pressure type flow rate control device | Tadahiro Ohmi, Kazuhiko Sugiyama, Shoichi Hino, Eiji Takahashi, Makoto Saegusa +4 more | 2010-03-02 |
| 7206502 | Apparatus and method for recording and reproducing digital data | Hiroaki Kubo, Masahiro Murakami | 2007-04-17 |