Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8343842 | Method for reducing plasma discharge damage during processing | Terry A. Breeden, James D. Legg, Mehul D. Shroff, Ruiqi Tian | 2013-01-01 |
| 7951695 | Method for reducing plasma discharge damage during processing | Terry A. Breeden, James D. Legg, Mehul D. Shroff, Ruiqi Tian | 2011-05-31 |
| 6882745 | Method and apparatus for translating detected wafer defect coordinates to reticle coordinates using CAD data | Keith Brankner | 2005-04-19 |