| 11862466 |
Method and device for bonding substrates |
Peter Nikolaus Oberhumer, Gunther Hesser |
2024-01-02 |
| 11694977 |
Method for producing a connection between component parts |
Simeon Katz, Sophia Huppmann, Michael Hoenle, Thorsten Wagner |
2023-07-04 |
| 10971365 |
Method and device for bonding substrates |
Peter Nikolaus Oberhumer, Gunther Hesser |
2021-04-06 |
| 10825793 |
Method for permanently bonding wafers |
Thomas Plach, Markus Wimplinger, Christoph Flotgen |
2020-11-03 |
| 10163681 |
Method for permanently bonding wafers by a connecting layer by means of solid state diffusion or phase transformation |
Klaus Martinschitz, Markus Wimplinger, Bernhard Rebhan |
2018-12-25 |
| 10083933 |
Method for permanent bonding of wafers |
Thomas Plach, Markus Wimplinger, Christoph Flotgen |
2018-09-25 |
| 9252042 |
Method for permanent bonding of wafers |
Thomas Plach, Markus Wimplinger, Christoph Flotgen |
2016-02-02 |
| 9159717 |
Method for permanently bonding wafers |
Thomas Plach, Markus Wimplinger, Christoph Flotgen |
2015-10-13 |
| 8975158 |
Method for permanently bonding wafers |
Thomas Plach, Markus Wimplinger, Christoph Flotgen |
2015-03-10 |