Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11270902 | Electrostatic substrate holder | — | 2022-03-08 |
| 11139170 | Apparatus and method for bonding substrates | Markus Wimplinger, Viorel Dragoi | 2021-10-05 |
| 10825793 | Method for permanently bonding wafers | Thomas Plach, Kurt Hingerl, Markus Wimplinger | 2020-11-03 |
| 10707059 | Method and device for plasma treatment of substrates | Thomas Glinsner, Johann Bernauer, Thomas Wagenleitner, Thomas Wieser, Florian Schmid +4 more | 2020-07-07 |
| 10438798 | Apparatus and method for bonding substrates | Markus Wimplinger, Viorel Dragoi | 2019-10-08 |
| 10083933 | Method for permanent bonding of wafers | Thomas Plach, Kurt Hingerl, Markus Wimplinger | 2018-09-25 |
| 9899223 | Apparatus and method for bonding substrates including changing a stoichiometry of oxide layers formed on the substrates | Markus Wimplinger, Viorel Dragoi | 2018-02-20 |
| 9252042 | Method for permanent bonding of wafers | Thomas Plach, Kurt Hingerl, Markus Wimplinger | 2016-02-02 |
| 9159717 | Method for permanently bonding wafers | Thomas Plach, Kurt Hingerl, Markus Wimplinger | 2015-10-13 |
| 8975158 | Method for permanently bonding wafers | Thomas Plach, Kurt Hingerl, Markus Wimplinger | 2015-03-10 |