Issued Patents All Time
Showing 26–32 of 32 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6508631 | Radial flow turbomolecular vacuum pump | Donald K. Smith | 2003-01-21 |
| 5688382 | Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate | Lawrence P. Bourget, William M. Holber, Donald K. Smith, Richard S. Post | 1997-11-18 |
| 5637279 | Ozone and other reactive gas generator cell and system | Donald K. Smith | 1997-06-10 |
| 5625259 | Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube | William M. Holber, Donald K. Smith, Matthew P. Fitzner, Eric Georgelis | 1997-04-29 |
| 5568015 | Fluid-cooled dielectric window for a plasma system | William M. Holber, Donald K. Smith, Matthew P. Fitzner, Eric Georgelis | 1996-10-22 |
| 5556475 | Microwave plasma reactor | Evelio Sevillano, Donald K. Smith | 1996-09-17 |
| 5501740 | Microwave plasma reactor | Evelio Sevillano, Donald K. Smith | 1996-03-26 |